• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    A suction device (14) for an end effector (10) for holding substrates has a base body (28) having a through-channel (36) and a contact surface (38) and a sealing lip (30). The contact surface has an edge (39) and at least one recess (40), wherein the passage channel (36) opens into the at least one recess (40) and wherein the at least one recess (40) in front of the edge (39) of the contact surface (40). 38) ends. The base body (28) has a base portion (32) and a mounting portion (34) adjacent to the base portion (32). Provided in the attachment portion (34) is at least one communication passage (44) fluidly connected to the passageway (36) and extending from the edge of the attachment portion (34). Furthermore, an end effector (10) and a method for producing an end effector (10) are shown.
    公开号:AT519587A2
    申请号:T50059/2018
    申请日:2018-01-24
    公开日:2018-08-15
    发明作者:
    申请人:Suss Microtec Lithography Gmbh；
    IPC主号:
    专利说明:

    Summary
    A suction device (14) for an end effector (10) for holding substrates has a base body (28), which has a through channel (36) and a contact surface (38), and a sealing lip (30). The contact surface has an edge (39) and at least one recess (40), the through-channel (36) opening into the at least one recess (40) and the at least one recess (40) in front of the edge (39) of the contact surface ( 38) ends. The base body (28) has a base section (32) and a fastening section (34) which adjoins the base section (32). At least one connecting channel (44) is provided in the fastening section (34), which is fluidly connected to the through channel (36) and which extends from the edge of the fastening section (34).
    An end effector (10) and a method for producing an end effector (10) are also shown.
    (Fig. 2) / 15
    The invention relates to a suction device for an end effector for holding substrates, an end effector for holding substrates with a suction device and a method for producing an end effector.
    End effectors are the last element in a kinematic chain of transport devices, for example robots. They are used, for example, to grasp or hold objects.
    In chip manufacturing, end effectors are typically used to hold substrates such as wafers to move the substrates between different process stations.
    Suction devices for end effectors for microchip production are known and usually have a suction groove or a suction cup, for example a sealing lip attached to the end effector. A channel in the end effector can create a negative pressure inside the suction cup or the suction groove, which can be used to hold flat objects, such as substrates or wafers.
    When sucking through a groove, the substrate usually lies directly on the end effector. This prevents movement of the substrate after the exposure. However, this is only possible with substrates with particularly flat and smooth surfaces. Arched substrates cannot be fixed on the end effector in this way.
    The suction cup can also be used to hold curved substrates because they do not lie directly on the end effector. However, small movements of the substrate are still possible, which can reduce the precision of the placement of the substrate. In addition, the comparatively large volume in the suction cup means that the substrate cannot be released quickly. For example, releasing is supported by flushing the line or switching to an overpressure. Furthermore, this type of suction often leads to the substrates sticking to the suction cup, which makes it even more difficult to let go.
    In addition, when fixing substrates with conventional suction grooves or seals, a suction force acts locally at the location of the suction groove or the seal, which often have a particularly small diameter to maximize the suction force. This can damage particularly thin and fragile substrates
    It is therefore an object of the invention to provide a suction cup, an end effector and a method for producing an end effector, which enable precise positioning of the substrate. In particular also of curved and particularly sensitive substrates.
    The object is achieved by a suction device for an end effector for holding substrates, with a base body which has a through channel and a contact surface, / 15
    2 and a sealing lip which surrounds the contact surface at the edge, the contact surface having an edge and at least one depression, in particular a suction groove, the through-channel opening into the at least one depression. Preferably, the sealing lip also completely surrounds the contact surface on the edge and can alternatively or additionally be spaced from the edge. The base body has a conical or cylindrical base section, the end face of which represents the contact surface. The base body has a fastening section which adjoins the base section on the end face of the base section facing away from the contact surface. At least one connecting channel is provided in the fastening section, which is fluidly connected to the through-channel and which extends from the edge of the fastening section.
    Within the scope of this invention, substrates in particular also include wafers and substrates such as semiconductor wafers, glass wafers, flexible substrates (flexible substrates), wafers artificially produced from chips and potting compound (molded wafers; molded wafers with embedded dies) or substrates with 3-dimensional surfaces, Roger that.
    Although the term suction device is used, it can also be a fixing device that fixes substrates by means of excess pressure, in which case the Bernoulli effect is used.
    Due to the contact surface and the depressions provided on the contact surface, the substrate lies directly against the contact surface of the base body, closes the recess tightly and is therefore fixed there. Since the base body is rigid, the wafer can no longer move relative to the base body.
    Because the substrate tightly closes the depressions in the completely sucked-in state, the sealing lip no longer contributes to the holding force and is then not evacuated further. Therefore, the pressure within the volume of the sealing lip can adapt to the ambient pressure again while the substrate is being held. This makes releasing the substrate easier and more precise, since it is no longer necessary to flood the entire volume enclosed by the sealing lip in order to release the substrate. Furthermore, the negative pressure within the volume of the sealing lip can be maintained for a certain time even in the completely sucked-in state. The pressure that occurs within the volume of the sealing lip can depend on the substrate. In addition, the base body is easy to manufacture and assemble and the suction device can be easily attached in an end effector by means of the fastening section. Furthermore, a channel for evacuation extends through the entire base body.
    The through-channel can be arranged concentrically in the base section. The base section can in particular be circular cylindrical.
    / 15
    - 3 It is also conceivable that the base body is glued to the end effector.
    In addition, the base body can be made in one piece.
    The directions used to describe the invention relate to the cylindrical or conical shape of the sections of the base body.
    For example, the sealing lip is made of an elastic material such as rubber or silicone. The base body can be rigid and is preferably made of an electrically conductive material such as stainless steel or a conductive plastic. This prevents electrostatic charges. The base body surface can also be coated with a thin dissipative coating with a surface resistance of, for example, 105 to 10 11 ohms. This coating can have a thickness of up to 50 μm.
    At least two depressions can be provided, which are arranged in a cross shape. As a result, the area inside the base body that is exposed to the vacuum can be increased.
    For example, the at least one depression ends in front of the edge of the contact area. The depression does not break through the edge of the suction device anywhere. Thus, the recess is only open towards the contact surface and not laterally. This ensures that the substrate tightly closes the recess when in contact.
    In order to simplify the manufacture of the base body, the at least one depression can become flatter starting from the through-channel and in particular merge into the contact area.
    In one embodiment of the invention, the sealing lip is fastened to the base section and extends to the contact surface or beyond a plane defined by the contact surface. The result of this is that, on the one hand, the substrate can be easily received using the sealing lip and, on the other hand, it is ensured at the same time that the substrate finally rests on the contact surface after the sealing lip has been slightly deformed.
    The base section preferably has an annular groove on its circumference, in which the sealing lip is fastened. The sealing lip can be a disc with a concentric hole. This enables a simple construction of the suction device.
    For example, the function of the sealing lip can be improved if the annular groove extends obliquely to a radial plane of the base section. The angle between the radial plane and the annular groove can be greater than or equal to 5 °.
    The connecting channel can be at least one groove in order to simplify the manufacture of the fastening section or the base body.
    / 15
    - 4 For example, several connecting channels are provided, which are arranged in a star shape, so that no particular orientation of the suction device has to be taken into account when mounting the end effector.
    Furthermore, the object is achieved by an end effector for holding substrates with a carrier and at least one suction device according to the invention, which is attached to the base body.
    In order to be able to securely fasten the base body of the suction device to the end effector, the carrier can have a fastening opening through which the base section of the base body extends, the fastening opening having a smaller diameter than the fastening section, and the fastening section having a larger diameter than the base section , In this way, the base body of the suction device can be easily attached to the end effector.
    Furthermore, the diameter of the fastening opening can also be larger or approximately the same size as the diameter of the fastening section. In this case, the fastening section can be inserted into the fastening opening and, if necessary, glued.
    The sealing lip is preferably provided on the side of the fastening opening facing away from the fastening section, the suction device being fixed in the fastening opening by the sealing lip and the fastening section.
    At least one fluid channel, in particular a vacuum channel, is provided in the carrier, the at least one connecting channel of the fastening section being fluidly connected to the at least one fluid channel of the carrier, as a result of which a negative pressure can be generated in the region of the depressions.
    In one embodiment of the invention, the carrier has at least two layers, the base body, in particular the fastening section, being fastened between the two layers. This makes it easy to securely attach the base body to the carrier.
    The object is further achieved by a method for producing an end effector, in particular an end effector according to the invention, with the following steps:
    a) providing a first layer of the end effector, which has a fastening opening,
    b) inserting the base body of the suction device into the fastening opening from the first side of the first layer, and
    c) attaching a second layer of the end effector to the first layer and / or the base body, in particular from the first side.
    / 15
    - 5 The first side is, for example, the top of the first layer and the carrier, that is to say the side on which the substrate is received when used as intended. In this way, a simple yet reliable attachment of the suction device to the carrier of the end effector is possible.
    The sealing lip is preferably attached to the base body from a second side of the first layer opposite the first side, so that the sealing lip also serves to attach the suction device to the carrier. The second side is, for example, the underside of the first layer or the carrier.
    Further features and advantages of the invention will become apparent from the following description and from the accompanying drawings, to which reference is made. The drawings show:
    1 shows an end effector according to the invention with a suction device according to the invention and a cassette in a perspective view,
    FIG. 2 shows a section through the end effector according to FIG. 1 in the area of one of the suction devices according to the invention,
    - Figure 3 is a sectional view through a base body of an inventive
    suction device
    - Figure 4 shows the base body of Figure 3 in a perspective view, and
    - Figure 5 shows the base body of Figure 3 in a bottom view.
    1 shows an end effector 10 in an empty cassette 11 for substrates. End effectors 10 are components of robots at the end of a kinematic chain.
    The end effector 10 can be attached to a robotic arm (not shown) for moving substrates e.g. Wafers, are attached and is a holder in the embodiment shown. However, it could also be a gripper.
    The end effector 10 has a carrier 12 and two suction devices 14 provided on the carrier 12.
    For example, the carrier 12 has a recess through which two holding arms 16 of the end effector 10 are formed, on which the suction devices 14 are arranged.
    In the sectional illustration shown in FIG. 2, it can be seen that the end effector 10 comprises a plurality of layers, namely an upper layer 18 and a middle layer 20, which together form a first layer 21, and a lower layer 22, which represents a second layer 23 , is constructed.
    / 15
    - 6 The lower layer 22 is continuously closed, and the upper layer 18 is also almost closed, except for two fastening openings 24, in each of which one of the suction devices 14 is inserted, and feed bores around the suction device with vacuum or compressed air or gas to dine.
    The middle layer 20 has a slot which extends and branches through the entire support 12, the two branches ending in the region of the fastening opening 24.
    This slot is covered by the upper layer 18 and the lower layer 20 in the vertical direction, so that a fluid channel 26 is formed in the carrier 12, which ends in the region of the fastening opening 24 and which is a vacuum channel in the embodiment shown.
    The suction device 14 is inserted in the fastening opening 24 on the carrier 12.
    The suction device 14 has a base body 28 and a sealing lip 30 which is fastened to the base body 28.
    FIGS. 3 to 5 show the base body 28 of the suction device 14 in detail, but without the sealing lip 30.
    The base body 28 has a base section 32 and a fastening section 34, the base section 32 adjoining the fastening section 34.
    The base body 28 is made of a rigid material. For example, stainless steel or conductive plastic are suitable for this. The material can be electrically conductive. The conductivity can serve to reduce electrostatic charge on the substrate or to avoid electrical charging. Furthermore, the surface of the base body 28 can be coated with a thin dissipative coating with a surface resistance of, for example, 105 to 10 11 ohms.
    The base section 32 and the fastening section 34 are made in one piece.
    Both the base section 32 and the fastening section 34 are cylindrical, in particular circular cylindrical and concentrically aligned with one another, the fastening section 34 having a larger diameter than the base section 32.
    It is also conceivable that the base section 32 and / or the fastening section 34 are conical.
    A through-channel 36 extends concentrically in the axial direction through the base body 28, that is to say also through the base section 32 and the fastening section 34.
    The base section 32 has a contact surface 38 on its end face facing away from the fastening section 34.
    / 15
    7 The contact area 38 is delimited on the circumference of the base section 32 by an edge 39, and the through-channel 36 opens out, for example, in the center of the contact area 38.
    Two depressions 40 are provided in the contact area 38, which form a cross, for example, and intersect at the center of the contact area 38. The through channel 36 thus opens into the depressions 40.
    The depressions 40 each extend in the radial direction over the majority of the contact surface 38. However, the depressions 40 end with each of their ends in front of the edge 39 of the contact surface 38.
    The depressions 40 thus do not break through the edge 39, so that they are not open in the radial direction to the outside of the base body.
    The depth of the depressions 40 changes in the radial direction. The depressions 40 at the mouth of the through-channel 36 have the greatest depth. Starting from there, the depth decreases with increasing distance from the through-channel 36 until the depressions 40 finally merge into the contact surface 38.
    In addition, a circumferential annular groove 42 is provided in the base section 32 between the fastening section 34 and the contact surface 38, in which the sealing lip 30 can be fastened.
    In the exemplary embodiment shown, the annular groove 42 encloses an angle α with a radial plane which is greater than or equal to 5 ° here.
    As can be clearly seen in FIG. 5, a plurality of connecting channels 44 are provided in the fastening section 34. In the embodiment shown, there are three connection channels 44.
    The connecting channels 44 are introduced as grooves in the fastening section 34, into which the through channel 36 opens. The connecting channels 44 are thus fluidly connected to the through channel 36 and thus also to the depressions 40.
    In the exemplary embodiment shown, the connecting channels 44 run from the edge of the fastening section 34 over the center of the fastening section 34 to the opposite edge; they are arranged in a star shape.
    When the suction device 14 is fastened to the carrier 12, the base section 32 extends through the fastening opening 24, as can be seen in FIG. 2. The fastening section 34 then lies between the upper, first layer 18 and the lower, second layer 22 and can be clamped between these layers 18, 22. In the axial direction, the fastening section 34 is therefore in the region of the middle layer 20.
    / 15
    For this purpose, the fastening opening 24 has a diameter which is slightly larger than the diameter of the base section 32, but smaller than the diameter of the fastening section 34.
    In other words, the larger diameter of the fastening section 34 creates a step at the transition to the base section 32 on which the upper layer 18 rests.
    The thickness of the middle layer 20 preferably corresponds essentially to the height of the fastening section 34.
    The fluidic connection between the depressions 40 and the fluid channel 26 takes place via the fastening section 34. The connection channels 44 are in fluid communication with the fluid channel 26 of the carrier 12 through their openings on the edge. A fluidic connection between the depressions 40 and the fluid channel 26 of the carrier 12 is thus established by means of the connecting channels 44 and the through channel 36.
    The sealing lip 30 of the suction device 14 is a disc with a concentric hole and made of an elastic material such as rubber.
    The sealing lip 30 is inserted into the annular groove 42 of the base section 32 and extends on the upper side O of the upper layer 18 both in the radial direction and in the axial direction to the contact surface 38.
    In the context of the invention, the top side O is understood to mean the side of the top layer 18 or the end effector 10 on which the substrate is intended to rest when used as intended. The underside U is the opposite side of the end effector 10.
    In the embodiment shown, the sealing lip 30 protrudes slightly beyond a plane which is defined by the contact surface 38. Its end facing away from the base section 32 is spaced from the edge 39.
    For better sealing, the sealing lip 30 is also resiliently pretensioned on the top layer 18 of the carrier 12.
    The suction device 14 is fixed to the carrier 12 in the fastening opening 24 by the sealing lip 30, which abuts the upper, first layer 18 from the upper side O, and by the fastening section 34, which acts on the upper layer 18 from the underside U. ,
    For holding or possibly gripping substrates, a vacuum is applied to the depressions 40 via the fluid channel 26, the connecting channels 44 and the through-channel 36, which vacuum is provided by a vacuum source (not shown), for example a vacuum pump.
    / 15
    If the end effector 10 with the suction devices 14 is now brought up from below or above to a substrate (not shown), the sealing lip lies on the substrate. The sealing space delimited by the sealing lip is evacuated by the applied vacuum until the substrate (also under the contribution of its own weight) deforms the sealing lip and rests on the contact surface 38.
    From the moment when the substrate lies completely against the contact surface 38, the substrate seals the depressions 40 with respect to the sealing space of the sealing lip 30.
    The depressions 40 are now further evacuated from the vacuum source and the substrate is thereby pressed more firmly against the contact surface 38. The substrate is thereby securely and immovably fixed directly on the contact surface 38.
    The cross-shaped arrangement and the width of the depressions ensure that the vacuum acts evenly over a large area.
    At the same time, however, there is no longer any fluidic connection between the sealing space of the sealing lip 30 and the vacuum source, so that the negative pressure in the sealing space is slowly reduced by ambient air which inevitably penetrates from the outside. However, this has no influence on the fixing of the substrate, since it is securely held directly on the contact surface 38 by the depressions 40.
    If the substrate is now to be deposited or detached, the vacuum source is deactivated and the depressions 40 are vented against the ambient pressure.
    Due to the small volume of the depressions 40 compared to the volume of the entire sealing space of the sealing lip 30, significantly less air has to flow into the depressions 40 in order to equalize the pressure and thus release the substrate. This will release the substrate faster and more evenly.
    The manufacture of the end effector 10 is described below.
    First, the first layer 21 is at least partially provided.
    The middle layer 20 can either already be attached to the top layer 18 so that the first layer 21 is complete, or the middle layer 20 is attached to the top layer 18 at a later time.
    In the next step, the base section 32 of the base body 28 is guided from the underside U through the fastening opening 24 of the first layer 21 without a sealing lip 30 being inserted.
    / 15
    Subsequently or at a later point in time, the sealing lip 30 is then inserted from the upper side O into the annular groove 42, which then protrudes from the fastening opening 24 towards the upper side O.
    If necessary, the middle layer 20 is now attached to the upper layer 18 in order to complete the first layer 21.
    The lower layer 22, that is to say the second layer 23, is then attached to the first layer 21, more precisely to the middle layer 20, from the underside U. At the same time, the base body 28 is thereby also fastened to the carrier 12.
    The different layers 18, 20, 22 are preferably glued together. It is also possible to glue the fastening section 34.
    / 15
    权利要求:
    Claims (15)
    [1]
    claims
    1. Suction device for an end effector (10) for holding substrates, with a base body (28) which has a through channel (36) and a contact surface (38), and a sealing lip (30) which surrounds the contact surface (38) at the edge , wherein the contact surface (38) has an edge (39) and at least one recess (40), in particular a suction groove, the through channel (36) opening into the at least one recess (40), the base body (28) having a conical or having a cylindrical base section (32), the end face of which represents the contact surface (38), the base body (28) having a fastening section (34) which is connected to the base section (32) on the end face of the base section (32) facing away from the contact surface (38) ) adjacent, characterized in that in the fastening section (34) at least one connecting channel (44) is provided, which is fluidly connected to the through channel (36) and which extends from the edge of the fastening section ttes (34) extends from.
    [2]
    2. Suction device according to claim 1, characterized in that the at least one depression (40) ends in front of the edge (39) of the contact surface (38).
    [3]
    3. Suction device according to claim 1 or 2, characterized in that the at least one recess (40) starting from the through-channel (36) becomes flatter and in particular merges into the contact surface (38).
    [4]
    4. Suction device according to one of the preceding claims, characterized in that the sealing lip (30) is attached to the base section (32) and extends to the contact surface (38) or beyond a plane defined by the contact surface (38).
    [5]
    5. Suction device according to one of the preceding claims, characterized in that the base section (32) has on its circumference an annular groove (42) in which the sealing lip (30) is fastened.
    [6]
    6. Suction device according to claim 5, characterized in that the annular groove (42) extends obliquely to a radial plane of the base section (32).
    [7]
    7. End effector for holding substrates with a carrier (12) and at least one suction device (14) according to any one of the preceding claims, which is attached to the carrier (12).
    [8]
    8. End effector according to claim 7, characterized in that the carrier (12) has a fastening opening (24) through which the base section (32) of the base body (28)
    12/15
    - 12 extends, wherein the fastening opening (24) has a smaller diameter than the fastening section (34), and wherein the fastening section (34) has a larger diameter than the base section (32).
    [9]
    9. End effector according to claim 8, characterized in that the sealing lip (30) is provided on the side of the fastening opening (24) facing away from the fastening section (34), the suction device (14) through the sealing lip (30) and the fastening section (34 ) is fixed in the fastening opening (24).
    [10]
    10. End effector according to claim 8 or 9, characterized in that at least one fluid channel, in particular a vacuum channel (26) is provided in the carrier (12), the at least one connecting channel (44) of the fastening section (34) with the at least one fluid channel ( 26) of the carrier (12) is fluidly connected.
    [11]
    11. End effector according to one of claims 7 to 10, characterized in that the carrier (12) has at least two layers (18, 20, 22), the base body (28), in particular the fastening section (34), between the two layers (18, 22) is attached.
    [12]
    12. A method for producing an end effector (10), in particular according to claim 11, comprising the following steps:
    a) providing a first layer (21) of the end effector (10) which has a fastening opening (24),
    b) inserting the base body (28) of the suction device (14) into the fastening opening (24) from a first side of the first layer (21), and
    c) attaching a second layer (23) of the end effector (10) to the first layer (21) and / or the base body (28), in particular from the first side.
    [13]
    13. The method according to claim 12, characterized in that the sealing lip (30) from a second side opposite the first side of the first layer (21) is attached to the base body (28).
    13/15


    [14]
    14/15



    [15]
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    同族专利:
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    DE102018100856A1|2018-08-02|
    AT519587B1|2021-10-15|
    TWI710438B|2020-11-21|
    NL2018243B1|2018-08-07|
    TW201831290A|2018-09-01|
    AT519587A3|2020-02-15|
    KR102344555B1|2021-12-28|
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    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US4131267A|1978-06-02|1978-12-26|Disco Kabushiki Kaisha|Apparatus for holding workpiece by suction|
    US5226636A|1992-06-10|1993-07-13|International Business Machines Corporation|Holding fixture for substrates|
    JPH07273499A|1994-03-30|1995-10-20|Matsushita Electric Ind Co Ltd|Panel holding device|
    JP2002184835A|2000-12-13|2002-06-28|Ando Electric Co Ltd|Suction pad|
    US6942265B1|2002-10-23|2005-09-13|Kla-Tencor Technologies Corporation|Apparatus comprising a flexible vacuum seal pad structure capable of retaining non-planar substrates thereto|
    US20050110292A1|2002-11-26|2005-05-26|Axcelis Technologies, Inc.|Ceramic end effector for micro circuit manufacturing|
    WO2004067234A1|2003-01-29|2004-08-12|Mitsuboshi Diamond Industrial Co., Ltd.|Vacuum suction head|
    US7055875B2|2003-07-11|2006-06-06|Asyst Technologies, Inc.|Ultra low contact area end effector|
    US8556315B2|2009-03-31|2013-10-15|Ats Automation Tooling Systems Inc.|Vacuum gripper assembly|
    JP5345167B2|2011-03-18|2013-11-20|東京エレクトロン株式会社|Substrate holding device|
    JP2014176914A|2013-03-14|2014-09-25|Nippon Electric Glass Co Ltd|Suction pad and suction device|
    JP5861677B2|2013-07-08|2016-02-16|株式会社安川電機|Adsorption structure, robot hand and robot|
    US9991152B2|2014-03-06|2018-06-05|Cascade Microtech, Inc.|Wafer-handling end effectors with wafer-contacting surfaces and sealing structures|WO2021016389A1|2019-07-22|2021-01-28|Rorze Automation, Inc.|Systems and methods for horizontal wafer packaging|
    PT3772089T|2019-07-30|2021-06-28|Semsysco Gmbh|Substrate handling device for a wafer|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    NL2018243A|NL2018243B1|2017-01-27|2017-01-27|Suction apparatus for an end effector, end effector for holding substrates and method of producing an end effector|
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